Sputter targets are prepared either by a melt- or a powder metallurgical process.
Various geometric shapes are possible.
Metals
| Aluminium | Chromium | Lead | Platinum | Tantalum |
| Antimony | Cobalt | Lithium | Potassium | Tellurium |
| Barium | Gallium | Magnesium | Rhenium | Tin |
| Beryllium | Germanium | Manganese | Rhodium | Titanium |
| Bismuth | Gold | Molybdenum | Rubidium | Tungsten |
| Boron | Hafnium | Niobium | Ruthenium | Vanadium |
| Cadmium | Indium | Nickel | Selenium | Zinc |
| Calcium | Iridium | Osmium | Silicon | Zirkonium |
| Carbon | Iron | Palladium | Strontium |
Rare Earth
| Cerium | Gadolinium | Neodymium | Terbium | Various Rare |
| Dysprosium | Holmium | Praseodymium | Thulium | Earth alloys |
| Erbium | Lutetium | Samarium | Ytterbium | |
| Europium | Lanthanum | Scandium | Yttrium |
Alloys
| Al/B | Au/Pt | Cr/SiO2Cermet | Ir/Mn | Si/Al |
| Al/Cu | Au/Sn | Cu/Al | Ni/Cr | Si/Cr |
| Al/Cu/Si | Au/Zn | Cu/Cr | Ni/Fe | Ta/Ti |
| Al/Cr | Bi/Sb | Cu/Ga | Ni/Ti | Ti/Al |
| Al/Li | Bi/Sb/Se | Cu/Ni | Ni/V | Ti/W |
| Al/Mg | Bi/Sb/Se/Te | Cu/Sn | Ni/Zr | Ti/Zr |
| Al/Si | Bi/Sb/Te | Fe/Al/Si | Os/Ru | W/Ti |
| Al/Ti | Bi/Se | Fe/Cr | Pb/Se | Zn/Al |
| Au/Sb | Bi/Te | Fe/Mn | Pb/Te | Zr/Y |
| Au/Ag | Cd/Te | Fe/Ru/Ga/Si | Pb/Se/Te | |
| Au/B | So/Cr | Fe/Si | Pd/Pt | and others |
| Au/Be | Co/Fe | Fe/Si/B/C | Pt/Ru | |
| Au/Ge | Co/Nb/Zr | Ge/Si | Pt/Ag | |
| Au/Ir | Co/Ni | Ge/Te | Sb/In | |
| Au/Pd | Co/Ta/Zr | In/Sn | Sb/In/Sn |
Oxides
| Al2O3 | CuO | PbZrO3 | Supercond. | Y2O3 |
| Sb2O3 | HfO2 unstab. | LiNbO3 | SrO | ZnO |
| BaTiO3 | HfO2/CaO | MgO | SrTiO3 | ZnO dop. |
| Bi2O3 | HfO2/Y2O3 | MoO3 | SrZrO3 | ZrO2 unstab. |
| Bi2TiO5 | In2O3 | Nb2O3 | Ta2O5 | ZrO2/CaO |
| Bi4Ti3O12 | ITO | Nb2O5 | ThO2 | ZrO2/Y2O3 |
| BiTiO3 | LaAlO3 | RE2O3 | SnO2 | |
| CeO2 | La2O3 | SiO2 | TiO2 | and others |
| CrO3 | PbTiO3 | SiO | WO3 |
Borides
| CrB2 | Mo2B6 | TiB2 | VB2 | and others |
| HfB2 | NbB2 | Wb | ZrB2 | |
| LaB6 | TaB2 | W2B |
Carbides
| B4C | Mo2C | TaC | WC6%Co | ZrC |
| Cr3C2 | NbC | TiC | WC12%Co | and others |
| HfC | SiC | WC | VC |
Fluorides
| AlF3 | CeF3 | LiF | RE/NaF | YF3 |
| BaF2 | LaF3 | MgF2 | Na3AlF6 | |
| CaF2 | PbF2 | KF | ThF4 | and others |
Nitrides
| AlN | HfN | Si3N4 | TiN | ZrN |
| BN | NbN | TaN | VN | and others |
Silicides
| CrSi2 | MoSi2 | TaSi2 | Ti5Si3 | V3Si |
| Cr3Si | NbSi2 | Ta5Si3 | WSi2 | ZrSi2 |
| HfSi2 | PtSi | TiSi2 | VSi2 | and others |
Sulfides, Selenides, Tellurides
| As2S3 | PbS | NbSe2 | TaTe2 | ZnS |
| CdSe | PbTe | Nb-S | WSe2 | ZnTe |
| CdSe | MoSe2 | NbTe2 | WsS2 | |
| CdTe | MoS2 | TaSe2 | WTe2 | and others |
| PbSe | MoTe2 | TaS2 | ZnSe |
Other materials available upon request.
We can also offer copper backing plates and bonding.
When asking for a quotation please inform about the desired size, purity,
exact composition, geometrical shape and quantity.
© 1996 - 2008 MaTecK GmbH - Im Langenbroich 20 - D-52428 Juelich - phone: +49 (0) 2461 / 9352-0 - fax: +49 (0) 2461 / 9352-11 - Contact: info@mateck.de
